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Hard a-C(N):H films obtained from plasma decomposition of methylamine-containing mixtures
Lacerda, M.M., Franceschini, D.F., Freire, F.L., Mariotto, G.Volume:
6
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(96)00749-2
Date:
April, 1997
File:
PDF, 593 KB
english, 1997