Analysis of GeH4 and GeF4 as gaseous feed materials for...

Vacuum 1989 Vol. 39; Iss. 7-8

Analysis of GeH4 and GeF4 as gaseous feed materials for germanium implantation

A Ferreiro, J du Port de Pontcharra, C Jaussad, E Lora-Tamayo
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Volume:
39
Year:
1989
Language:
english
Pages:
5
DOI:
10.1016/0042-207x(89)90035-3
File:
PDF, 295 KB
english, 1989
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