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Determination of the complex refractive index multilayer structures by spectroscopic rotating analyzer ellipsometry
J Antó, E Pascual, E Bertran, JL MorenzaVolume:
39
Year:
1989
Language:
english
Pages:
2
DOI:
10.1016/0042-207x(89)90069-9
File:
PDF, 215 KB
english, 1989