Characterization of high-energy heavy-ion implanted InP...

Vacuum 1989 Vol. 39; Iss. 2-4

Characterization of high-energy heavy-ion implanted InP crystals by a variety of techniques

Fulin Xiong, CW Nieh, TA Tombrello, DN Jamieson, T Vreeland Jr
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Volume:
39
Year:
1989
Language:
english
Pages:
6
DOI:
10.1016/0042-207x(89)90190-5
File:
PDF, 891 KB
english, 1989
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