Argon-boron double implantation in silicon

Vacuum 1989 Vol. 39; Iss. 2-4

Argon-boron double implantation in silicon

Gao Lu-quan, Zhu Jin-liang, Cai Ren-keng, Jiang Xin-yuan
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Volume:
39
Year:
1989
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(89)90194-2
File:
PDF, 272 KB
english, 1989
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