Si ion implantation into LEC semi-insulating GaAs

Vacuum 1989 Vol. 39; Iss. 2-4

Si ion implantation into LEC semi-insulating GaAs

Dowson Lee, Zhou Shuxing, Yan Shulan
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Volume:
39
Year:
1989
Language:
english
Pages:
2
DOI:
10.1016/0042-207x(89)90196-6
File:
PDF, 172 KB
english, 1989
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