The annealing of MeV energy boron ions implanted into silicon
Lu Wuxing, Qian Yahong, Lu Diantong, Wang ZhonglieVolume:
39
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(89)90203-0
File:
PDF, 370 KB
english, 1989