A Monte Carlo simulation of angular distribution in low...

A Monte Carlo simulation of angular distribution in low energy sputtering

Zheng Li-Ping, Cui Fu-Zhai
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Volume:
39
Year:
1989
Language:
english
Pages:
2
DOI:
10.1016/0042-207x(89)90240-6
File:
PDF, 204 KB
english, 1989
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