Effects of different glow discharge conditions on deposition rates of copper in a dc magnetron sputtering system
A Rizk, SB Youssef, NS Rizk, SK HabibVolume:
39
Year:
1989
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(89)90270-4
File:
PDF, 279 KB
english, 1989