Microstructural defects in hydrogen implanted silicon a TEM study
Beaufort, M.F., Garem, H., Lépinoux, J., Desoyer, J.C.Volume:
25
Year:
1991
Language:
english
DOI:
10.1016/0956-716X(91)90526-7
File:
PDF, 390 KB
english, 1991