Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2013 / 12 Vol. 317
Analysis of Mo/Si multilayers by means of RBS
Roessler, W., Primetzhofer, D., Bauer, P.Volume:
317
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2012.12.084
Date:
December, 2013
File:
PDF, 596 KB
english, 2013