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Stress relaxation of continuous film and narrow line metallizations of aluminum on silicon substrates
Korhonen, M.A., Paszkiet, C.A., Black, R.D., Li, Che-YuVolume:
24
Year:
1990
Language:
english
DOI:
10.1016/0956-716X(90)90082-R
File:
PDF, 431 KB
english, 1990