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Structural, mechanical and hydrophobic properties of fluorine-doped diamond-like carbon films synthesized by plasma immersion ion implantation and deposition (PIII?D)
YAO, ZVolume:
230
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/S0169-4332(04)00163-1
Date:
May, 2004
File:
PDF, 333 KB
english, 2004