Effects of time-dependent substrate biasing and gas...

Diamond and Related Materials 2010 / 11 Vol. 19; Iss. 11

Effects of time-dependent substrate biasing and gas composition on the nucleation of cubic boron nitride thin films

Nose, K., Yang, H.S., Kambara, M., Yoshida, T.
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Volume:
19
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2010.07.006
Date:
November, 2010
File:
PDF, 929 KB
english, 2010
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