Hard carbon and composite metal/hard carbon films prepared...

Vacuum 1990 Vol. 40; Iss. 3

Hard carbon and composite metal/hard carbon films prepared by a dc unbalanced planar magnetron

H Biederman, K Kohoutek, Z Chmel, V Stary, RP Howson
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Volume:
40
Year:
1990
Language:
english
Pages:
5
DOI:
10.1016/0042-207x(90)90039-2
File:
PDF, 850 KB
english, 1990
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