Columns, texture and nodular defects in dc-magnetron...

Columns, texture and nodular defects in dc-magnetron sputtered CoCr thin films

HJ Anklam, L Fritzsch, R Mattheis, S Müller-Pfeiffer, F Thrum
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Volume:
40
Year:
1990
Language:
english
DOI:
10.1016/0042-207x(90)90210-p
File:
PDF, 122 KB
english, 1990
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