Reactive sputtering of TiN films at large substrate to...

Reactive sputtering of TiN films at large substrate to target distances

J Musil, S Kadlec
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Volume:
40
Year:
1990
Language:
english
Pages:
10
DOI:
10.1016/0042-207x(90)90241-p
File:
PDF, 1.13 MB
english, 1990
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