Thermal and photon-assisted interaction of ammonia, silane and oxygen with indium phosphide substrates
F Houzay, J.M. Moison, C Licoppe, Y.I. NissimVolume:
41
Year:
1990
Language:
english
Pages:
2
DOI:
10.1016/0042-207x(90)90461-7
File:
PDF, 161 KB
english, 1990