Growth of high-quality epitaxial ZnO films on (10–10) sapphire by atomic layer deposition with flow-rate interruption method
Huang, Jheng-Ming, Ku, Ching-Shun, Lee, Hsin-Yi, Lin, Chih-Ming, Chen, San-YuanVolume:
231
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2012.05.067
Date:
September, 2013
File:
PDF, 802 KB
english, 2013