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Solid state reactions and diffusion processes in metal - Si3N4 - Si thin film systems—a comparison between Cr, Co and Ni metals
F Edelman, E.Y Gutmanas, R BrenerVolume:
41
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(90)93930-h
File:
PDF, 316 KB
english, 1990