![](/img/cover-not-exists.png)
Sensor head for measurement of stress anisotropy in thin films
H. Hornauer, J. Patrikos, K. RöllVolume:
41
Year:
1990
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(90)93940-k
File:
PDF, 212 KB
english, 1990