Sensor head for measurement of stress anisotropy in thin...

Sensor head for measurement of stress anisotropy in thin films

H. Hornauer, J. Patrikos, K. Röll
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Volume:
41
Year:
1990
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(90)93940-k
File:
PDF, 212 KB
english, 1990
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