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Depth profile measurements of Ptxsix layers by combined SIMS, SNMS, AES and XPS: M Altebockwinkel, W Storm, L Wiedmann and A Benninghoven, Physialisches Institut der Universität, Wilhelm-Klemm-Str 10, D-4400 Münster, FRG
Volume:
41
Year:
1990
Language:
english
Pages:
2
DOI:
10.1016/0042-207x(90)94088-8
File:
PDF, 198 KB
english, 1990