Multistage dry pumps

Vacuum 1990 Vol. 41; Iss. 7-9

Multistage dry pumps

Heinz-Dieter Bürger, E. Rossmanith, J-M. Crinquette, M. Taberlet
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Volume:
41
Year:
1990
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(90)94103-w
File:
PDF, 373 KB
english, 1990
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