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Development of a bakeable cryopump for extreme high vacuum
H. Yamakawa, Y. Matsui, K. Yui, H. YanagidaVolume:
41
Year:
1990
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(90)94107-2
File:
PDF, 354 KB
english, 1990