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Electron behaviour in cylindrical magnetron sputtering source
Y. Funato, K. Akaishi, Y. Kubota, T. Tuzuki, A. MiyaharaVolume:
41
Year:
1990
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(90)94145-g
File:
PDF, 251 KB
english, 1990