Discharge cleaning and gas trapping by use of a glow-mode plasma source
T. Kawabe, M. Kaminaga, M. Fukazawa, K. Nakazato, T. Hayashi, S. Sato, A. ItohVolume:
41
Year:
1990
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(90)94150-o
File:
PDF, 231 KB
english, 1990