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Low voltage magnetron discharges for thin film preparation
K Steenbeck, E Steinbeiß, S Winkler, G Schmidt, G BruchlosVolume:
42
Year:
1991
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(91)90074-s
File:
PDF, 214 KB
english, 1991