Characterization of high-dose implants of Co and Cr in Si by RBS
A Climent-Font, U Wätjen, H Bax, L PalmetshoferVolume:
42
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0042-207x(91)90111-u
File:
PDF, 542 KB
english, 1991