Origin of gas impurities in sputtering plasmas during thin...

Origin of gas impurities in sputtering plasmas during thin film deposition

M. Andritschky
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Volume:
42
Year:
1991
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(91)90173-g
File:
PDF, 486 KB
english, 1991
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