Direct current (dc)-plasma CVD equipment with auxiliary...

Vacuum 1991 Vol. 42; Iss. 17

Direct current (dc)-plasma CVD equipment with auxiliary heating electrodes

Nai-shi Zhao, Meng-chun Li, Xiao-jun Zhao, Jing-guo Wang
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Volume:
42
Year:
1991
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(91)90182-i
File:
PDF, 332 KB
english, 1991
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