Hydrogen incorporation in epitaxial layers of 4H- and 6H-silicon carbide grown by vapor phase epitaxy
Schöner, Adolf, Rottner, Kurt, Nordell, Nils, Linnarsson, Margareta, Peppermüller, Christian, Helbig, ReinhardVolume:
6
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(97)00106-4
Date:
August, 1997
File:
PDF, 531 KB
english, 1997