Regular growth combined with lateral etching in diamond...

Regular growth combined with lateral etching in diamond deposited over silicon substrate by using hot filament chemical vapor deposition technique

Ali, M., Ürgen, M.
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Volume:
273
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.02.124
Date:
May, 2013
File:
PDF, 758 KB
english, 2013
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