Regular growth combined with lateral etching in diamond deposited over silicon substrate by using hot filament chemical vapor deposition technique
Ali, M., Ürgen, M.Volume:
273
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.02.124
Date:
May, 2013
File:
PDF, 758 KB
english, 2013