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Analysis of formed insulator thin films in non-heated cathodes
YB Yankelevich, YA Barengolz, MB Khaskelberg, JJ Wolfengaut, VN DavydovVolume:
43
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(92)90088-e
File:
PDF, 476 KB
english, 1992