XPS investigation of the interaction between ECR-excited...

Vacuum 1992 Vol. 43; Iss. 3

XPS investigation of the interaction between ECR-excited hydrogen and the native oxide of GaAs (100)

G.M. Mikhailov, P.V. Bulkin, S.A. Khudobin, A.A. Chumakov, S.Yu. Shapoval
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Volume:
43
Year:
1992
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(92)90261-t
File:
PDF, 237 KB
english, 1992
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