Outgassing properties and structure of TiN films on stainless steel substrates
S Tsukahara, K Saitoh, S Inayoshi, K OnoeVolume:
43
Year:
1992
Language:
english
Pages:
2
DOI:
10.1016/0042-207x(92)90340-3
File:
PDF, 165 KB
english, 1992