Hydrogenated amorphous silicon germanium alloy with...

Vacuum 2013 / 3 Vol. 89

Hydrogenated amorphous silicon germanium alloy with enhanced photosensitivity prepared by plasma enhanced chemical vapor deposition at high temperature

Yan, Baojun, Zhao, Lei, Zhao, Bending, Chen, Jingwei, Wang, Guanghong, Diao, Hongwei, Mao, Yanli, Wang, Wenjing
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Volume:
89
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2012.09.004
Date:
March, 2013
File:
PDF, 634 KB
english, 2013
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