Fundamental test and design of turbomolecular pump with water trap using high Tc superconductor magnetic bearing
S Yagyu, I Fujishima, M MikiVolume:
44
Year:
1993
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(93)90135-w
File:
PDF, 245 KB
english, 1993