Model for re-emission during hydrogen ion implantation

Model for re-emission during hydrogen ion implantation

SK Zhdanov, OV Ogorodnikova, AA Pisarev
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Volume:
44
Year:
1993
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(93)90255-9
File:
PDF, 225 KB
english, 1993
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