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The PACVD method for surface layer deposition using a glow discharge in H2+N2+Ti(OC3H7)4
T Wierzchoń, J R SobieckiVolume:
44
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(93)90281-e
File:
PDF, 579 KB
english, 1993