The use of a symmetrical triple probe for direct reading of...

Vacuum 1993 Vol. 44; Iss. 10

The use of a symmetrical triple probe for direct reading of plasma parameters in a planar PCVD reactor

Zuli Liu, Donghui Liu, Cheng Ning
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Volume:
44
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(93)90294-k
File:
PDF, 332 KB
english, 1993
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