The effects of model parameter variations on high-fluence ion implantation
G Carter, MJ Nobes, IV Katardjiev, I Abril, A Gras-Marti, JJ Jimenez-Rodriguez, JA PeinadorVolume:
44
Year:
1993
Language:
english
Pages:
7
DOI:
10.1016/0042-207x(93)90307-v
File:
PDF, 755 KB
english, 1993