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Structure of a-Si: H/a-Si1−xCx: H multilayers deposited in a reactor with automated substrate holder
J Bertomeu, JM Asensi, J Puigdollers, J Andreu, JL MorenzaVolume:
44
Year:
1993
Language:
english
Pages:
6
DOI:
10.1016/0042-207x(93)90361-d
File:
PDF, 636 KB
english, 1993