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Electron microscopy of structurally different titanium disilicide films, obtained in one technological process
NA Kiselev, OI Lebedev, AL Vasiliev, AA Orlikovsky, KA Valiev, AG VasilievVolume:
44
Year:
1993
Language:
english
Pages:
8
DOI:
10.1016/0042-207x(93)90363-f
File:
PDF, 1.56 MB
english, 1993