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Ion kinetic aspects of plasma chemical deposition of PMMA (Polymethylmethacrylate) films
Michael Zeuner, Jürgen MeichsnerVolume:
46
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0042-207x(93)e0003-4
File:
PDF, 515 KB
english, 1995