Reactive ion etching of silicon carbide (SixC1 − x)
NJ Dartnell, MC Flowers, R Greef, J Zhu, A BlackburnVolume:
46
Year:
1995
Language:
english
Pages:
7
DOI:
10.1016/0042-207x(94)00077-8
File:
PDF, 831 KB
english, 1995