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Electron cyclotron resonance plasma deposition as a promising technique for low-temperature hard coatings
MJ Hernandez, FJ Gomez, J Garrido, J Piqueras, C Gomez-AleixandreVolume:
45
Year:
1994
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(94)90012-4
File:
PDF, 362 KB
english, 1994