Optical characterization of silicon nitride films deposited by ECR-CVD
S García, JM Maŕtin, I Mártil, G González-DíazVolume:
45
Year:
1994
Language:
english
Pages:
2
DOI:
10.1016/0042-207x(94)90013-2
File:
PDF, 235 KB
english, 1994