Optical characterization of silicon nitride films deposited...

Optical characterization of silicon nitride films deposited by ECR-CVD

S García, JM Maŕtin, I Mártil, G González-Díaz
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Volume:
45
Year:
1994
Language:
english
Pages:
2
DOI:
10.1016/0042-207x(94)90013-2
File:
PDF, 235 KB
english, 1994
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