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Study of boron nitride deposition process from diborane and ammonia gas mixtures
A Essafi, C Gomez-Aleixandre, JM AlbellaVolume:
45
Year:
1994
Language:
english
Pages:
2
DOI:
10.1016/0042-207x(94)90014-0
File:
PDF, 222 KB
english, 1994