Thin film technology applied to the development of a multilayer pressure sensor device
A García-Alonso, E Castaño, I Obieta, J Garcia, FJ GraciaVolume:
45
Year:
1994
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(94)90035-3
File:
PDF, 288 KB
english, 1994