Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2013 / 7 Vol. 307
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Size limit on the phosphorous doped silicon nanocrystals for dopant activation
Yang, P., Gwilliam, R.M., Crowe, I.F., Papachristodoulou, N., Halsall, M.P., Hylton, N.P., Hulko, O., Knights, A.P., Shah, M., Kenyon, A.J.Volume:
307
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2012.12.077
Date:
July, 2013
File:
PDF, 676 KB
english, 2013